# Design and analysis of a novel compact XYZ parallel precision positioning stage

> Research article (Microsystem Technologies, 2020) · cited 36× · AI/ML

**Wikidata**: [openalex:W3062448958](https://www.wikidata.org/wiki/openalex:W3062448958)  
**Source**: https://4ort.xyz/entity/design-and-analysis-of-a-novel-compact-xyz-parallel-precision-positioning-stage