# Design and Analysis of a Long-Stroke and High-Precision Positioning System for Scanning Beam Interference Lithography

> Research article (Electronics, 2023) · cited 10× · AI/ML

**Wikidata**: [openalex:W4389543290](https://www.wikidata.org/wiki/openalex:W4389543290)  
**Source**: https://4ort.xyz/entity/design-and-analysis-of-a-long-stroke-and-high-precision-positioning-system-for-scanning-beam-interference-lithography