# Depth resolution in sputter profiling revisited

> Research article (Surface and Interface Analysis, 2016) · cited 20× · AI/ML

**Wikidata**: [openalex:W2412034570](https://www.wikidata.org/wiki/openalex:W2412034570)  
**Source**: https://4ort.xyz/entity/depth-resolution-in-sputter-profiling-revisited