# Depth resolution and preferential sputtering in depth profiling of delta layers

> Research article (Applied Surface Science, 2018) · cited 10× · AI/ML

**Wikidata**: [openalex:W2806527156](https://www.wikidata.org/wiki/openalex:W2806527156)  
**Source**: https://4ort.xyz/entity/depth-resolution-and-preferential-sputtering-in-depth-profiling-of-delta-layers