# Depth profile analyses with sub 100-nm depth resolution of a metal thin film by femtosecond - laser ablation - inductively coupled plasma - time-of-flight mass spectrometry

> Research article (Spectrochimica Acta Part B Atomic Spectroscopy, 2018) · cited 20× · AI/ML

**Wikidata**: [openalex:W2885846207](https://www.wikidata.org/wiki/openalex:W2885846207)  
**Source**: https://4ort.xyz/entity/depth-profile-analyses-with-sub-100-nm-depth-resolution-of-a-metal-thin-film-by-femtosecond-laser-ablation-inductively-c