# Denoised Residual Trace Analysis for Monitoring Semiconductor Process Faults

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2019) · cited 24× · AI/ML

**Wikidata**: [openalex:W2946476603](https://www.wikidata.org/wiki/openalex:W2946476603)  
**Source**: https://4ort.xyz/entity/denoised-residual-trace-analysis-for-monitoring-semiconductor-process-faults