# Defective wafer detection using a denoising autoencoder for semiconductor manufacturing processes

> Research article (Advanced Engineering Informatics, 2020) · cited 71× · AI/ML

**Wikidata**: [openalex:W3086583482](https://www.wikidata.org/wiki/openalex:W3086583482)  
**Source**: https://4ort.xyz/entity/defective-wafer-detection-using-a-denoising-autoencoder-for-semiconductor-manufacturing-processes