# Defect simulation in SEM images using generative adversarial networks

> Research article (Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV, 2021) · cited 12× · AI/ML

**Wikidata**: [openalex:W3131976449](https://www.wikidata.org/wiki/openalex:W3131976449)  
**Source**: https://4ort.xyz/entity/defect-simulation-in-sem-images-using-generative-adversarial-networks