# Defect detection techniques robust to process variation in semiconductor inspection

> Research article (Measurement Science and Technology, 2019) · cited 15× · AI/ML

**Wikidata**: [openalex:W2908563653](https://www.wikidata.org/wiki/openalex:W2908563653)  
**Source**: https://4ort.xyz/entity/defect-detection-techniques-robust-to-process-variation-in-semiconductor-inspection