# DeepNAP: Deep neural anomaly pre-detection in a semiconductor fab

> Research article (Information Sciences, 2018) · cited 41× · AI/ML

**Wikidata**: [openalex:W2800015774](https://www.wikidata.org/wiki/openalex:W2800015774)  
**Source**: https://4ort.xyz/entity/deepnap-deep-neural-anomaly-pre-detection-in-a-semiconductor-fab