# Deep-Structured Machine Learning Model for the Recognition of Mixed-Defect Patterns in Semiconductor Fabrication Processes

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2018) · cited 139× · AI/ML

**Wikidata**: [openalex:W2798589477](https://www.wikidata.org/wiki/openalex:W2798589477)  
**Source**: https://4ort.xyz/entity/deep-structured-machine-learning-model-for-the-recognition-of-mixed-defect-patterns-in-semiconductor-fabrication-process