# Deep reinforcement learning optimized double exponentially weighted moving average controller for chemical mechanical polishing processes

> Research article (Process Safety and Environmental Protection, 2023) · cited 13× · AI/ML

**Wikidata**: [openalex:W4385598111](https://www.wikidata.org/wiki/openalex:W4385598111)  
**Source**: https://4ort.xyz/entity/deep-reinforcement-learning-optimized-double-exponentially-weighted-moving-average-controller-for-chemical-mechanical-po