# Deep open-set recognition for silicon wafer production monitoring

> Research article (Pattern Recognition, 2021) · cited 25× · AI/ML

**Wikidata**: [openalex:W4200071636](https://www.wikidata.org/wiki/openalex:W4200071636)  
**Source**: https://4ort.xyz/entity/deep-open-set-recognition-for-silicon-wafer-production-monitoring