# Deep neural network and meta-learning-based reactive sputtering with small data sample counts

> Research article (Journal of Manufacturing Systems, 2022) · cited 22× · AI/ML

**Wikidata**: [openalex:W4213051588](https://www.wikidata.org/wiki/openalex:W4213051588)  
**Source**: https://4ort.xyz/entity/deep-neural-network-and-meta-learning-based-reactive-sputtering-with-small-data-sample-counts