# Deep Learning Models for Data-Driven Laser Induced Breakdown Spectroscopy (LIBS) Analysis of Interstitial Oxygen Impurities in Czochralski-Si Crystals

> Research article (Applied Spectroscopy, 2022) · cited 13× · AI/ML

**Wikidata**: [openalex:W4213252909](https://www.wikidata.org/wiki/openalex:W4213252909)  
**Source**: https://4ort.xyz/entity/deep-learning-models-for-data-driven-laser-induced-breakdown-spectroscopy-libs-analysis-of-interstitial-oxygen-impuritie