# Deep learning-guided surface characterization for autonomous hydrogen lithography

> Research article (Machine Learning Science and Technology, 2020) · cited 29× · AI/ML

**Wikidata**: [openalex:W2979321866](https://www.wikidata.org/wiki/openalex:W2979321866)  
**Source**: https://4ort.xyz/entity/deep-learning-guided-surface-characterization-for-autonomous-hydrogen-lithography