# Deep learning for virtual metrology: Modeling with optical emission spectroscopy data

> Research article (2017 IEEE 3rd International Forum on Research and Technologies for Society and Industry (RTSI), 2017) · cited 17× · AI/ML

**Wikidata**: [openalex:W2762210428](https://www.wikidata.org/wiki/openalex:W2762210428)  
**Source**: https://4ort.xyz/entity/deep-learning-for-virtual-metrology-modeling-with-optical-emission-spectroscopy-data