# Deep learning denoising of SEM images towards noise-reduced LER measurements

> Research article (Microelectronic Engineering, 2019) · cited 57× · AI/ML

**Wikidata**: [openalex:W2955074792](https://www.wikidata.org/wiki/openalex:W2955074792)  
**Source**: https://4ort.xyz/entity/deep-learning-denoising-of-sem-images-towards-noise-reduced-ler-measurements