# Deep Learning-Based Dynamic Scheduling for Semiconductor Manufacturing With High Uncertainty of Automated Material Handling System Capability

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2020) · cited 60× · AI/ML

**Wikidata**: [openalex:W2998801207](https://www.wikidata.org/wiki/openalex:W2998801207)  
**Source**: https://4ort.xyz/entity/deep-learning-based-dynamic-scheduling-for-semiconductor-manufacturing-with-high-uncertainty-of-automated-material-handl
