# Deep Learning-Based Domain Adaptation Method for Fault Diagnosis in Semiconductor Manufacturing

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2020) · cited 74× · AI/ML

**Wikidata**: [openalex:W3027221375](https://www.wikidata.org/wiki/openalex:W3027221375)  
**Source**: https://4ort.xyz/entity/deep-learning-based-domain-adaptation-method-for-fault-diagnosis-in-semiconductor-manufacturing