# Deep learning-based detection, classification, and localization of defects in semiconductor processes

> Research article (Journal of Micro/Nanolithography MEMS and MOEMS, 2020) · cited 25× · AI/ML

**Wikidata**: [openalex:W3020045356](https://www.wikidata.org/wiki/openalex:W3020045356)  
**Source**: https://4ort.xyz/entity/deep-learning-based-detection-classification-and-localization-of-defects-in-semiconductor-processes