# Deep learning-based defect classification and detection in SEM images

> Research article (Metrology, Inspection, and Process Control XXXVI, 2022) · cited 29× · AI/ML

**Wikidata**: [openalex:W4224281238](https://www.wikidata.org/wiki/openalex:W4224281238)  
**Source**: https://4ort.xyz/entity/deep-learning-based-defect-classification-and-detection-in-sem-images