# Deep learning based defect classification and detection in SEM images: a mask R-CNN approach

> Research article (Metrology, Inspection, and Process Control XXXVI, 2022) · cited 21× · AI/ML

**Wikidata**: [openalex:W4281552804](https://www.wikidata.org/wiki/openalex:W4281552804)  
**Source**: https://4ort.xyz/entity/deep-learning-based-defect-classification-and-detection-in-sem-images-a-mask-r-cnn-approach