# Deep learning assisted fast mask optimization

> Research article (Optical Microlithography XXXI, 2018) · cited 23× · AI/ML

**Wikidata**: [openalex:W2792511683](https://www.wikidata.org/wiki/openalex:W2792511683)  
**Source**: https://4ort.xyz/entity/deep-learning-assisted-fast-mask-optimization