# Deep ensemble learning for material removal rate prediction in chemical mechanical planarization with pad surface topography

> Research article (Precision Engineering, 2024) · cited 12× · AI/ML

**Wikidata**: [openalex:W4396598427](https://www.wikidata.org/wiki/openalex:W4396598427)  
**Source**: https://4ort.xyz/entity/deep-ensemble-learning-for-material-removal-rate-prediction-in-chemical-mechanical-planarization-with-pad-surface-topogr