# Decomposition-learning-based thick-mask model for partially coherent lithography system

> Research article (Optics Express, 2023) · cited 13× · AI/ML

**Wikidata**: [openalex:W4377108204](https://www.wikidata.org/wiki/openalex:W4377108204)  
**Source**: https://4ort.xyz/entity/decomposition-learning-based-thick-mask-model-for-partially-coherent-lithography-system