# Decision-based virtual metrology for advanced process control to empower smart production and an empirical study for semiconductor manufacturing

> Research article (Computers & Industrial Engineering, 2022) · cited 45× · AI/ML

**Wikidata**: [openalex:W4280509466](https://www.wikidata.org/wiki/openalex:W4280509466)  
**Source**: https://4ort.xyz/entity/decision-based-virtual-metrology-for-advanced-process-control-to-empower-smart-production-and-an-empirical-study-for-sem