# Data Visualization of Anomaly Detection in Semiconductor Processing Tools

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2021) · cited 12× · AI/ML

**Wikidata**: [openalex:W4205137397](https://www.wikidata.org/wiki/openalex:W4205137397)  
**Source**: https://4ort.xyz/entity/data-visualization-of-anomaly-detection-in-semiconductor-processing-tools