# Data-Driven Model Predictive Control of Cz Silicon Single Crystal Growth Process With V/G Value Soft Measurement Model

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2021) · cited 34× · AI/ML

**Wikidata**: [openalex:W3165960344](https://www.wikidata.org/wiki/openalex:W3165960344)  
**Source**: https://4ort.xyz/entity/data-driven-model-predictive-control-of-cz-silicon-single-crystal-growth-process-with-v-g-value-soft-measurement-model