# Data-Driven Iterative Feedforward Tuning for a Wafer Stage: A High-Order Approach Based on Instrumental Variables

> Research article (IEEE Transactions on Industrial Electronics, 2018) · cited 50× · AI/ML

**Wikidata**: [openalex:W2806666419](https://www.wikidata.org/wiki/openalex:W2806666419)  
**Source**: https://4ort.xyz/entity/data-driven-iterative-feedforward-tuning-for-a-wafer-stage-a-high-order-approach-based-on-instrumental-variables