# Data-Driven Feedforward Learning With Force Ripple Compensation for Wafer Stages: A Variable-Gain Robust Approach

> Research article (IEEE Transactions on Neural Networks and Learning Systems, 2020) · cited 49× · AI/ML

**Wikidata**: [openalex:W3115118039](https://www.wikidata.org/wiki/openalex:W3115118039)  
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