# Data-Driven Approach for Fault Detection and Diagnostic in Semiconductor Manufacturing

> Research article (IEEE Transactions on Automation Science and Engineering, 2020) · cited 184× · AI/ML

**Wikidata**: [openalex:W3017264588](https://www.wikidata.org/wiki/openalex:W3017264588)  
**Source**: https://4ort.xyz/entity/data-driven-approach-for-fault-detection-and-diagnostic-in-semiconductor-manufacturing