# Data-Driven and Mechanism-Based Hybrid Model for Semiconductor Silicon Monocrystalline Quality Prediction in the Czochralski Process

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2022) · cited 25× · AI/ML

**Wikidata**: [openalex:W4293499153](https://www.wikidata.org/wiki/openalex:W4293499153)  
**Source**: https://4ort.xyz/entity/data-driven-and-mechanism-based-hybrid-model-for-semiconductor-silicon-monocrystalline-quality-prediction-in-the-czochra