# Data-Based Motion Control of Wafer Scanners

> Research article (IFAC-PapersOnLine, 2016) · cited 25× · AI/ML

**Wikidata**: [openalex:W2521402535](https://www.wikidata.org/wiki/openalex:W2521402535)  
**Source**: https://4ort.xyz/entity/data-based-motion-control-of-wafer-scanners