# Critical pattern selection method for full-chip source and mask optimization

> Research article (Optics Express, 2020) · cited 16× · AI/ML

**Wikidata**: [openalex:W3036800410](https://www.wikidata.org/wiki/openalex:W3036800410)  
**Source**: https://4ort.xyz/entity/critical-pattern-selection-method-for-full-chip-source-and-mask-optimization