# Correlation of actinic blank inspection and experimental phase defect printability on NXE3x00 EUV scanner

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2015) · cited 10× · AI/ML

**Wikidata**: [openalex:W2046375760](https://www.wikidata.org/wiki/openalex:W2046375760)  
**Source**: https://4ort.xyz/entity/correlation-of-actinic-blank-inspection-and-experimental-phase-defect-printability-on-nxe3x00-euv-scanner