# Convolutional neural network based multi-input multi-output model for multi-sensor multivariate virtual metrology in semiconductor manufacturing

> Research article (Annals of Operations Research, 2024) · cited 13× · AI/ML

**Wikidata**: [openalex:W4392883816](https://www.wikidata.org/wiki/openalex:W4392883816)  
**Source**: https://4ort.xyz/entity/convolutional-neural-network-based-multi-input-multi-output-model-for-multi-sensor-multivariate-virtual-metrology-in-sem