# Contribution of mask defectivity in stochastics of EUVL-based wafer printing

> Research article (Journal of Micro/Nanopatterning Materials and Metrology, 2021) · cited 10× · AI/ML

**Wikidata**: [openalex:W3161291277](https://www.wikidata.org/wiki/openalex:W3161291277)  
**Source**: https://4ort.xyz/entity/contribution-of-mask-defectivity-in-stochastics-of-euvl-based-wafer-printing