# Contacts and lines SEM image metrology with SMILE

> Research article (Photomask Technology 2021, 2021) · cited 11× · AI/ML

**Wikidata**: [openalex:W3201742421](https://www.wikidata.org/wiki/openalex:W3201742421)  
**Source**: https://4ort.xyz/entity/contacts-and-lines-sem-image-metrology-with-smile