# Contact layer decomposition to enable DSA with multi-patterning technique for standard cell based layout

> Research article (2016 21st Asia and South Pacific Design Automation Conference (ASP-DAC), 2016) · cited 27× · AI/ML

**Wikidata**: [openalex:W2292988356](https://www.wikidata.org/wiki/openalex:W2292988356)  
**Source**: https://4ort.xyz/entity/contact-layer-decomposition-to-enable-dsa-with-multi-patterning-technique-for-standard-cell-based-layout
