# Constrained Iterative Feedback Tuning for Robust Control of a Wafer Stage System

> Research article (IEEE Transactions on Control Systems Technology, 2015) · cited 106× · AI/ML

**Wikidata**: [openalex:W2015926173](https://www.wikidata.org/wiki/openalex:W2015926173)  
**Source**: https://4ort.xyz/entity/constrained-iterative-feedback-tuning-for-robust-control-of-a-wafer-stage-system