# Consistency and reproducibility in atomic layer deposition

> Research article (Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, 2020) · cited 107× · AI/ML

**Wikidata**: [openalex:W3004560547](https://www.wikidata.org/wiki/openalex:W3004560547)  
**Source**: https://4ort.xyz/entity/consistency-and-reproducibility-in-atomic-layer-deposition