# Confocal signal evaluation algorithms for surface metrology: uncertainty and numerical efficiency

> Research article (Applied Optics, 2017) · cited 27× · AI/ML

**Wikidata**: [openalex:W2735470689](https://www.wikidata.org/wiki/openalex:W2735470689)  
**Source**: https://4ort.xyz/entity/confocal-signal-evaluation-algorithms-for-surface-metrology-uncertainty-and-numerical-efficiency