# Comprehensive numerical modeling of the nonlinear structural behavior of MEMS/NEMS electrostatic actuators under the effect of the van der Waals forces

> Research article (Microsystem Technologies, 2017) · cited 15× · AI/ML

**Wikidata**: [openalex:W2612226785](https://www.wikidata.org/wiki/openalex:W2612226785)  
**Source**: https://4ort.xyz/entity/comprehensive-numerical-modeling-of-the-nonlinear-structural-behavior-of-mems-nems-electrostatic-actuators-under-the-eff
