# Compensating Misalignment Using Dynamic Random-Effect Control System: A Case of High-Mixed Wafer Fabrication

> Research article (IEEE Transactions on Automation Science and Engineering, 2019) · cited 17× · AI/ML

**Wikidata**: [openalex:W2919254770](https://www.wikidata.org/wiki/openalex:W2919254770)  
**Source**: https://4ort.xyz/entity/compensating-misalignment-using-dynamic-random-effect-control-system-a-case-of-high-mixed-wafer-fabrication