# Compact compliant parallel XY nano-positioning stage with high dynamic performance, small crosstalk, and small yaw motion

> Research article (Microsystem Technologies, 2017) · cited 30× · AI/ML

**Wikidata**: [openalex:W2770177399](https://www.wikidata.org/wiki/openalex:W2770177399)  
**Source**: https://4ort.xyz/entity/compact-compliant-parallel-xy-nano-positioning-stage-with-high-dynamic-performance-small-crosstalk-and-small-yaw-motion