# Combining X-ray Nano Tomography with focused ion beam serial section imaging — Application of correlative tomography to integrated circuits

> Research article (Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms, 2021) · cited 18× · AI/ML

**Wikidata**: [openalex:W3164157559](https://www.wikidata.org/wiki/openalex:W3164157559)  
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