# Combining 2 nm Spatial Resolution and 0.02% Precision for Deformation Mapping of Semiconductor Specimens in a Transmission Electron Microscope by Precession Electron Diffraction

> Research article (Nano Letters, 2015) · cited 41× · AI/ML

**Wikidata**: [openalex:W2411296057](https://www.wikidata.org/wiki/openalex:W2411296057)  
**Source**: https://4ort.xyz/entity/combining-2-nm-spatial-resolution-and-0-02-precision-for-deformation-mapping-of-semiconductor-specimens-in-a-transmissio