# Combined ToF-SIMS and AFM protocol for accurate 3D chemical analysis and data visualization

> Research article (Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena, 2018) · cited 11× · AI/ML

**Wikidata**: [openalex:W2792168779](https://www.wikidata.org/wiki/openalex:W2792168779)  
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