# Combined interpolation, scale change, and noise reduction in spectral analysis

> Research article (Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena, 2019) · cited 27× · AI/ML

**Wikidata**: [openalex:W2972881469](https://www.wikidata.org/wiki/openalex:W2972881469)  
**Source**: https://4ort.xyz/entity/combined-interpolation-scale-change-and-noise-reduction-in-spectral-analysis